Fabrication and modeling of narrow capillaries for vacuum system gas inlets

Ulrich Quaade, Søren Jensen, Ole Hansen

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Abstract

Micrometer-sized cylindrical capillaries with well-controlled dimensions are fabricated using deep reactive ion etching. The flow through the capillaries is experimentally characterized for varying pressures, temperatures, and diameters. For the parameters used, it is shown that the Knudsen number is in the intermediate flow regime, and Knudsen's expression for the flow fit the data well. The flow properties of the capillaries make them ideal for introducing gas into vacuum systems and in particular mass spectrometers. ©2005 American Institute of Physics
Original languageEnglish
JournalJournal of Applied Physics
Volume97
Issue number4
Pages (from-to)044906
ISSN0021-8979
DOIs
Publication statusPublished - 2005

Bibliographical note

Copyright (2005) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

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