Fabrication and characterization of truly three-dimensional
                diffuser/nozzle microstructures in silicon

Research output: Chapter in Book/Report/Conference proceeding › Book chapter › Research › peer-review

Original language	English
Title of host publication	Actuator 96
Place of Publication	Bremen
Publisher	Axon Technologie Consult GmbH
Publication date	1996
Pages	72-75
Publication status	Published - 1996
Event	5th International Conference on New Actuators - Bremen, Germany Duration: 26 Jun 1996 → 28 Jun 1996

Conference	5th International Conference on New Actuators
Country/Territory	Germany
City	Bremen
Period	26/06/1996 → 28/06/1996

OpenUrl availability

@inbook{c50414b8dfde447da47078ce3e656d55,

title = "Fabrication and characterization of truly three-dimensional diffuser/nozzle microstructures in silicon",

author = "Matthias Heschel and Matthias Mullenborn and Siebe Bouwstra",

year = "1996",

language = "English",

pages = "72--75",

booktitle = "Actuator 96",

publisher = "Axon Technologie Consult GmbH",

note = "5th International Conference on New Actuators<br/> ; Conference date: 26-06-1996 Through 28-06-1996",

}

TY - CHAP

T1 - Fabrication and characterization of truly three-dimensional diffuser/nozzle microstructures in silicon

AU - Heschel, Matthias

AU - Mullenborn, Matthias

AU - Bouwstra, Siebe

PY - 1996

Y1 - 1996

M3 - Book chapter

SP - 72

EP - 75

BT - Actuator 96

PB - Axon Technologie Consult GmbH

CY - Bremen

T2 - 5th International Conference on New Actuators<br/>

Y2 - 26 June 1996 through 28 June 1996

ER -