Fabrication and characterization of truly three-dimensional diffuser/nozzle microstructures in silicon

Matthias Heschel, Matthias Mullenborn, Siebe Bouwstra

    Research output: Chapter in Book/Report/Conference proceedingBook chapterResearchpeer-review

    Original languageEnglish
    Title of host publicationActuator 96
    Place of PublicationBremen
    PublisherAxon Technologie Consult GmbH
    Publication date1996
    Pages72-75
    Publication statusPublished - 1996
    Event5th International Conference on New Actuators
    - Bremen, Germany
    Duration: 26 Jun 199628 Jun 1996

    Conference

    Conference5th International Conference on New Actuators
    Country/TerritoryGermany
    CityBremen
    Period26/06/199628/06/1996

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