Fabrication and characterization of truly three-dimensional diffuser/nozzle microstructures in silicon

Matthias Heschel, Matthias Mullenborn, Siebe Bouwstra

    Research output: Chapter in Book/Report/Conference proceedingBook chapterResearchpeer-review

    Original languageEnglish
    Title of host publicationActuator 96
    Place of PublicationBremen
    PublisherAxon Technologie Consult GmbH
    Publication date1996
    Publication statusPublished - 1996
    Event5th Int. conf. on New Actuators -
    Duration: 1 Jan 1996 → …


    Conference5th Int. conf. on New Actuators
    Period01/01/1996 → …

    Cite this