Fabrication and characterization of SRN/SU-8 bimorph cantilevers for temperature sensing

Tom Larsen, Stephan Sylvest Keller, Silvan Schmid, Søren Dohn, Anja Boisen

    Research output: Contribution to journalConference articleResearchpeer-review


    Polymer coated ceramic cantilevers are highly sensitive to temperature changes, due to the large difference in coefficient of thermal expansion of the two materials. Silicon rich nitride (SRN) cantilevers coated with SU-8 for temperature sensing were fabricated and tested. The devices were coated with SU-8 through spin coating before they were released to obtain bimorph cantilevers. Deflection versus temperature measurements were carried out in ambient and nitrogen atmosphere. In ambient atmosphere, two different effects were observed as the temperature was cycled between 20 and 50°C; (i) shrinkage of SU-8 with increasing temperature, due to evaporation of absorbed moisture and (ii) thermal expansion of SRN and SU-8. Separately, these two effects generate bending in opposite direction. The observed overall bending was seen to be a combination of both. In nitrogen atmosphere, the cantilevers showed a unidirectional deflection versus temperature characteristic. Transverse bending of the cantilevers resulted in an increased rigidity of the cantilevers which could explain the ∼50% lower temperature response compared to the theoretical values.
    Original languageEnglish
    JournalMicroelectronic Engineering
    Issue number8
    Pages (from-to)2311-2313
    Publication statusPublished - 2011
    Event36th International Conference on Micro- and Nano-Engineering - Genoa, Italy
    Duration: 19 Sep 201022 Sep 2010
    Conference number: 36


    Conference36th International Conference on Micro- and Nano-Engineering
    Internet address


    • Bimorph cantilevers
    • SU-8
    • Humidity
    • Temperature sensing


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