| Original language | English |
|---|---|
| Journal | Journal of Vacuum Science & Technology B |
| Volume | 18 |
| Issue number | 2 |
| Pages (from-to) | 612-612 |
| ISSN | 1071-1023 |
| Publication status | Published - 2000 |
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Research output: Contribution to journal › Journal article › Research › peer-review
| Original language | English |
|---|---|
| Journal | Journal of Vacuum Science & Technology B |
| Volume | 18 |
| Issue number | 2 |
| Pages (from-to) | 612-612 |
| ISSN | 1071-1023 |
| Publication status | Published - 2000 |