Fabrication and characterization of nano-resonating devices for mass detection

Z. Davis, G. Abadal, Oliver Kuhn, Ole Hansen, Francois Grey, Anja Boisen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalJournal of Vacuum Science & Technology B
    Volume18
    Issue number2
    Pages (from-to)612-612
    ISSN1071-1023
    Publication statusPublished - 2000

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