Abstract
Zinc oxide based piezoelectric accelerometers were fabricated by bulk micromachining. A high yield was obtained in a relatively simple process sequence. For two electrode configurations a direction selectivity better than 100 was obtained for acceleration in the vertical direction and a selectivity of 3 for acceleration in the horizontal direction, respectively. The charge sensitivity in the vertical direction is better than 0.1 pC g-L and a noise level of 1× 10-4 g Hz-L/2 was estimated.
Original language | English |
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Journal | Journal of Micromechanics and Microengineering |
Volume | 9 |
Issue number | 2 |
Pages (from-to) | 123-126 |
ISSN | 0960-1317 |
DOIs | |
Publication status | Published - 1999 |