Fabrication and characterization of a piezoelectric accelerometer

Roger De Reus, Jens Gulløv, Patrick Scheeper

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    Abstract

    Zinc oxide based piezoelectric accelerometers were fabricated by bulk micromachining. A high yield was obtained in a relatively simple process sequence. For two electrode configurations a direction selectivity better than 100 was obtained for acceleration in the vertical direction and a selectivity of 3 for acceleration in the horizontal direction, respectively. The charge sensitivity in the vertical direction is better than 0.1 pC g-L and a noise level of 1× 10-4 g Hz-L/2 was estimated.
    Original languageEnglish
    JournalJournal of Micromechanics and Microengineering
    Volume9
    Issue number2
    Pages (from-to)123-126
    ISSN0960-1317
    DOIs
    Publication statusPublished - 1999

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