Extraction of a linearly distributed focused ion beam from a matrix-ECR plasma produced in reactive gases

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings
Publication date	2011
Pages	59-60
ISBN (Print)	978-4-86348-216-6
Publication status	Published - 2011
Event	33rd International Symposium on Dry Process - Kyoto, Japan Duration: 10 Nov 2011 → 11 Nov 2011 Conference number: 33 http://www.dps2011.kuaero.kyoto-u.ac.jp/

Conference	33rd International Symposium on Dry Process
Number	33
Country/Territory	Japan
City	Kyoto
Period	10/11/2011 → 11/11/2011
Internet address	http://www.dps2011.kuaero.kyoto-u.ac.jp/

OpenUrl availability

@inproceedings{72a4f3a258dc4b398b0745f761372c90,

title = "Extraction of a linearly distributed focused ion beam from a matrix-ECR plasma produced in reactive gases",

author = "Eugen Stamate",

year = "2011",

language = "English",

isbn = "978-4-86348-216-6",

pages = "59--60",

booktitle = "Proceedings",

note = "33rd International Symposium on Dry Process, DPS 2011 ; Conference date: 10-11-2011 Through 11-11-2011",

url = "http://www.dps2011.kuaero.kyoto-u.ac.jp/",

}

TY - GEN

T1 - Extraction of a linearly distributed focused ion beam from a matrix-ECR plasma produced in reactive gases

AU - Stamate, Eugen

N1 - Conference code: 33

PY - 2011

Y1 - 2011

M3 - Article in proceedings

SN - 978-4-86348-216-6

SP - 59

EP - 60

BT - Proceedings

T2 - 33rd International Symposium on Dry Process

Y2 - 10 November 2011 through 11 November 2011

ER -