Extraction of a linearly distributed focused ion beam from a matrix-ECR plasma produced in reactive gases

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings
    Publication date2011
    Pages59-60
    ISBN (Print)978-4-86348-216-6
    Publication statusPublished - 2011
    Event33rd International Symposium on Dry Process - Kyoto, Japan
    Duration: 10 Nov 201111 Nov 2011
    Conference number: 33
    http://www.dps2011.kuaero.kyoto-u.ac.jp/

    Conference

    Conference33rd International Symposium on Dry Process
    Number33
    CountryJapan
    CityKyoto
    Period10/11/201111/11/2011
    Internet address

    Cite this

    @inproceedings{72a4f3a258dc4b398b0745f761372c90,
    title = "Extraction of a linearly distributed focused ion beam from a matrix-ECR plasma produced in reactive gases",
    author = "Eugen Stamate",
    year = "2011",
    language = "English",
    isbn = "978-4-86348-216-6",
    pages = "59--60",
    booktitle = "Proceedings",

    }

    Stamate, E 2011, Extraction of a linearly distributed focused ion beam from a matrix-ECR plasma produced in reactive gases. in Proceedings. pp. 59-60, 33rd International Symposium on Dry Process, Kyoto, Japan, 10/11/2011.

    Extraction of a linearly distributed focused ion beam from a matrix-ECR plasma produced in reactive gases. / Stamate, Eugen.

    Proceedings. 2011. p. 59-60.

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    TY - GEN

    T1 - Extraction of a linearly distributed focused ion beam from a matrix-ECR plasma produced in reactive gases

    AU - Stamate, Eugen

    PY - 2011

    Y1 - 2011

    M3 - Article in proceedings

    SN - 978-4-86348-216-6

    SP - 59

    EP - 60

    BT - Proceedings

    ER -