# Experimental Validation of Topology Optimization for RF MEMS Capacitive Switch Design

Mandy Axelle Philippine, Hosein Zareie, Ole Sigmund, Gabriel M. Rebeiz, Thomas W. Kenny

Research output: Contribution to journalJournal articleResearchpeer-review

### Abstract

In this paper, we present 30 distinct RF MEMS capacitive switch designs that are the product of topology optimizations that control key mechanical properties such as stiffness, response to intrinsic stress gradients, and temperature sensitivity. The designs were evaluated with high-accuracy simulations prior to micro-fabrication. We built and tested more than 170 switches, including at least five per distinct design. Experimental results confirm that the finite element models are accurate and that the switches behave as intended by the different optimizations. Extensive testing results include actuation and release voltages as a function of temperature, switching times, capacitance ratios, fitted S-parameters, and profile measurements during actuation and over temperature. $\hfill{[2013\hbox{-}0203]}$
Original language English I E E E Journal of Microelectromechanical Systems 22 6 1296-1309 1057-7157 https://doi.org/10.1109/JMEMS.2013.2283241 Published - 2013

### Keywords

• Components, Circuits, Devices and Systems
• Engineered Materials, Dielectrics and Plasmas
• Topology optimization
• Optimization
• RF MEMS
• RF switch
• Capacitive switch
• Mechanical design
• Stress stiffening
• Temperature sensitivity

### Cite this

Philippine, Mandy Axelle ; Zareie, Hosein ; Sigmund, Ole ; Rebeiz, Gabriel M. ; Kenny, Thomas W. / Experimental Validation of Topology Optimization for RF MEMS Capacitive Switch Design. In: I E E E Journal of Microelectromechanical Systems. 2013 ; Vol. 22, No. 6. pp. 1296-1309.
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title = "Experimental Validation of Topology Optimization for RF MEMS Capacitive Switch Design",
abstract = "In this paper, we present 30 distinct RF MEMS capacitive switch designs that are the product of topology optimizations that control key mechanical properties such as stiffness, response to intrinsic stress gradients, and temperature sensitivity. The designs were evaluated with high-accuracy simulations prior to micro-fabrication. We built and tested more than 170 switches, including at least five per distinct design. Experimental results confirm that the finite element models are accurate and that the switches behave as intended by the different optimizations. Extensive testing results include actuation and release voltages as a function of temperature, switching times, capacitance ratios, fitted S-parameters, and profile measurements during actuation and over temperature. $\hfill{[2013\hbox{-}0203]}$",
keywords = "Components, Circuits, Devices and Systems, Engineered Materials, Dielectrics and Plasmas, Topology optimization, Optimization, RF MEMS, RF switch, Capacitive switch, Mechanical design, Stress stiffening, Temperature sensitivity",
author = "Philippine, {Mandy Axelle} and Hosein Zareie and Ole Sigmund and Rebeiz, {Gabriel M.} and Kenny, {Thomas W.}",
year = "2013",
doi = "10.1109/JMEMS.2013.2283241",
language = "English",
volume = "22",
pages = "1296--1309",
journal = "I E E E Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "Institute of Electrical and Electronics Engineers",
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Experimental Validation of Topology Optimization for RF MEMS Capacitive Switch Design. / Philippine, Mandy Axelle; Zareie, Hosein; Sigmund, Ole; Rebeiz, Gabriel M.; Kenny, Thomas W.

In: I E E E Journal of Microelectromechanical Systems, Vol. 22, No. 6, 2013, p. 1296-1309.

Research output: Contribution to journalJournal articleResearchpeer-review

TY - JOUR

T1 - Experimental Validation of Topology Optimization for RF MEMS Capacitive Switch Design

AU - Philippine, Mandy Axelle

AU - Zareie, Hosein

AU - Sigmund, Ole

AU - Rebeiz, Gabriel M.

AU - Kenny, Thomas W.

PY - 2013

Y1 - 2013

N2 - In this paper, we present 30 distinct RF MEMS capacitive switch designs that are the product of topology optimizations that control key mechanical properties such as stiffness, response to intrinsic stress gradients, and temperature sensitivity. The designs were evaluated with high-accuracy simulations prior to micro-fabrication. We built and tested more than 170 switches, including at least five per distinct design. Experimental results confirm that the finite element models are accurate and that the switches behave as intended by the different optimizations. Extensive testing results include actuation and release voltages as a function of temperature, switching times, capacitance ratios, fitted S-parameters, and profile measurements during actuation and over temperature. $\hfill{[2013\hbox{-}0203]}$

AB - In this paper, we present 30 distinct RF MEMS capacitive switch designs that are the product of topology optimizations that control key mechanical properties such as stiffness, response to intrinsic stress gradients, and temperature sensitivity. The designs were evaluated with high-accuracy simulations prior to micro-fabrication. We built and tested more than 170 switches, including at least five per distinct design. Experimental results confirm that the finite element models are accurate and that the switches behave as intended by the different optimizations. Extensive testing results include actuation and release voltages as a function of temperature, switching times, capacitance ratios, fitted S-parameters, and profile measurements during actuation and over temperature. $\hfill{[2013\hbox{-}0203]}$

KW - Components, Circuits, Devices and Systems

KW - Engineered Materials, Dielectrics and Plasmas

KW - Topology optimization

KW - Optimization

KW - RF MEMS

KW - RF switch

KW - Capacitive switch

KW - Mechanical design

KW - Stress stiffening

KW - Temperature sensitivity

U2 - 10.1109/JMEMS.2013.2283241

DO - 10.1109/JMEMS.2013.2283241

M3 - Journal article

VL - 22

SP - 1296

EP - 1309

JO - I E E E Journal of Microelectromechanical Systems

JF - I E E E Journal of Microelectromechanical Systems

SN - 1057-7157

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