Experimental investigation on the influence of instrument settings on pixel size and nonlinearity in SEM image formation

Lorenzo Carli, Gianfranco Genta, Angela Cantatore, Giulio Barbato, Leonardo De Chiffre, Raffaello Levi

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

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Abstract

The work deals with an experimental investigation on the influence of three Scanning Electron Microscope (SEM) instrument settings, accelerating voltage, spot size and magnification, on the image formation process. Pixel size and nonlinearity were chosen as output parameters related to image quality and resolution. A silicon grating calibrated artifact was employed to investigate qualitatively and quantitatively, through a designed experiment approach, the parameters relevance. SEM magnification was found to account by far for the largest contribution on both parameters under consideration. Optimal instrument settings were also identified.
Original languageEnglish
Title of host publicationProceedings of the 10th euspen International Conference
Volume1
Publication date2010
Pages192-195
ISBN (Print)978-0-9553082-8-4
Publication statusPublished - 2010
Event10th International Conference of the European Society for Precision Engineering and Nanotechnology - Zürich, Switzerland
Duration: 18 May 200822 May 2008
Conference number: 10

Conference

Conference10th International Conference of the European Society for Precision Engineering and Nanotechnology
Number10
CountrySwitzerland
CityZürich
Period18/05/200822/05/2008

Keywords

  • SEM

Cite this

Carli, L., Genta, G., Cantatore, A., Barbato, G., De Chiffre, L., & Levi, R. (2010). Experimental investigation on the influence of instrument settings on pixel size and nonlinearity in SEM image formation. In Proceedings of the 10th euspen International Conference (Vol. 1, pp. 192-195)
Carli, Lorenzo ; Genta, Gianfranco ; Cantatore, Angela ; Barbato, Giulio ; De Chiffre, Leonardo ; Levi, Raffaello. / Experimental investigation on the influence of instrument settings on pixel size and nonlinearity in SEM image formation. Proceedings of the 10th euspen International Conference. Vol. 1 2010. pp. 192-195
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Carli, L, Genta, G, Cantatore, A, Barbato, G, De Chiffre, L & Levi, R 2010, Experimental investigation on the influence of instrument settings on pixel size and nonlinearity in SEM image formation. in Proceedings of the 10th euspen International Conference. vol. 1, pp. 192-195, 10th International Conference of the European Society for Precision Engineering and Nanotechnology, Zürich, Switzerland, 18/05/2008.

Experimental investigation on the influence of instrument settings on pixel size and nonlinearity in SEM image formation. / Carli, Lorenzo; Genta, Gianfranco; Cantatore, Angela; Barbato, Giulio; De Chiffre, Leonardo; Levi, Raffaello.

Proceedings of the 10th euspen International Conference. Vol. 1 2010. p. 192-195.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

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T1 - Experimental investigation on the influence of instrument settings on pixel size and nonlinearity in SEM image formation

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AU - Genta, Gianfranco

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AU - De Chiffre, Leonardo

AU - Levi, Raffaello

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N2 - The work deals with an experimental investigation on the influence of three Scanning Electron Microscope (SEM) instrument settings, accelerating voltage, spot size and magnification, on the image formation process. Pixel size and nonlinearity were chosen as output parameters related to image quality and resolution. A silicon grating calibrated artifact was employed to investigate qualitatively and quantitatively, through a designed experiment approach, the parameters relevance. SEM magnification was found to account by far for the largest contribution on both parameters under consideration. Optimal instrument settings were also identified.

AB - The work deals with an experimental investigation on the influence of three Scanning Electron Microscope (SEM) instrument settings, accelerating voltage, spot size and magnification, on the image formation process. Pixel size and nonlinearity were chosen as output parameters related to image quality and resolution. A silicon grating calibrated artifact was employed to investigate qualitatively and quantitatively, through a designed experiment approach, the parameters relevance. SEM magnification was found to account by far for the largest contribution on both parameters under consideration. Optimal instrument settings were also identified.

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VL - 1

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BT - Proceedings of the 10th euspen International Conference

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Carli L, Genta G, Cantatore A, Barbato G, De Chiffre L, Levi R. Experimental investigation on the influence of instrument settings on pixel size and nonlinearity in SEM image formation. In Proceedings of the 10th euspen International Conference. Vol. 1. 2010. p. 192-195