Abstract
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 10th euspen International Conference |
| Volume | 1 |
| Publication date | 2010 |
| Pages | 192-195 |
| ISBN (Print) | 978-0-9553082-8-4 |
| Publication status | Published - 2010 |
| Event | 10th International Conference of the European Society for Precision Engineering and Nanotechnology - Zürich, Switzerland Duration: 18 May 2008 → 22 May 2008 Conference number: 10 |
Conference
| Conference | 10th International Conference of the European Society for Precision Engineering and Nanotechnology |
|---|---|
| Number | 10 |
| Country | Switzerland |
| City | Zürich |
| Period | 18/05/2008 → 22/05/2008 |
Keywords
- SEM
Cite this
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Experimental investigation on the influence of instrument settings on pixel size and nonlinearity in SEM image formation. / Carli, Lorenzo; Genta, Gianfranco; Cantatore, Angela; Barbato, Giulio; De Chiffre, Leonardo; Levi, Raffaello.
Proceedings of the 10th euspen International Conference. Vol. 1 2010. p. 192-195.Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review
TY - GEN
T1 - Experimental investigation on the influence of instrument settings on pixel size and nonlinearity in SEM image formation
AU - Carli, Lorenzo
AU - Genta, Gianfranco
AU - Cantatore, Angela
AU - Barbato, Giulio
AU - De Chiffre, Leonardo
AU - Levi, Raffaello
PY - 2010
Y1 - 2010
N2 - The work deals with an experimental investigation on the influence of three Scanning Electron Microscope (SEM) instrument settings, accelerating voltage, spot size and magnification, on the image formation process. Pixel size and nonlinearity were chosen as output parameters related to image quality and resolution. A silicon grating calibrated artifact was employed to investigate qualitatively and quantitatively, through a designed experiment approach, the parameters relevance. SEM magnification was found to account by far for the largest contribution on both parameters under consideration. Optimal instrument settings were also identified.
AB - The work deals with an experimental investigation on the influence of three Scanning Electron Microscope (SEM) instrument settings, accelerating voltage, spot size and magnification, on the image formation process. Pixel size and nonlinearity were chosen as output parameters related to image quality and resolution. A silicon grating calibrated artifact was employed to investigate qualitatively and quantitatively, through a designed experiment approach, the parameters relevance. SEM magnification was found to account by far for the largest contribution on both parameters under consideration. Optimal instrument settings were also identified.
KW - SEM
M3 - Article in proceedings
SN - 978-0-9553082-8-4
VL - 1
SP - 192
EP - 195
BT - Proceedings of the 10th euspen International Conference
ER -