Experimental investigation on the influence of instrument settings on pixel size and nonlinearity in SEM image formation

Lorenzo Carli; Gianfranco Genta; Angela Cantatore; Giulio Barbato; Leonardo De Chiffre; Raffaello Levi

Experimental investigation on the influence of instrument settings on pixel size and nonlinearity in SEM image formation

Lorenzo Carli, Gianfranco Genta, Angela Cantatore, Giulio Barbato, Leonardo De Chiffre, Raffaello Levi

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

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Abstract

The work deals with an experimental investigation on the influence of three Scanning Electron Microscope (SEM) instrument settings, accelerating voltage, spot size and magnification, on the image formation process. Pixel size and nonlinearity were chosen as output parameters related to image quality and resolution. A silicon grating calibrated artifact was employed to investigate qualitatively and quantitatively, through a designed experiment approach, the parameters relevance. SEM magnification was found to account by far for the largest contribution on both parameters under consideration. Optimal instrument settings were also identified.

Original language	English
Title of host publication	Proceedings of the 10th euspen International Conference
Volume	1
Publication date	2010
Pages	192-195
ISBN (Print)	978-0-9553082-8-4
Publication status	Published - 2010
Event	10th International Conference of the European Society for Precision Engineering and Nanotechnology - Zürich, Switzerland Duration: 18 May 2008 → 22 May 2008 Conference number: 10

Conference

Conference	10th International Conference of the European Society for Precision Engineering and Nanotechnology
Number	10
Country	Switzerland
City	Zürich
Period	18/05/2008 → 22/05/2008

Keywords

SEM

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title = "Experimental investigation on the influence of instrument settings on pixel size and nonlinearity in SEM image formation",

abstract = "The work deals with an experimental investigation on the influence of three Scanning Electron Microscope (SEM) instrument settings, accelerating voltage, spot size and magnification, on the image formation process. Pixel size and nonlinearity were chosen as output parameters related to image quality and resolution. A silicon grating calibrated artifact was employed to investigate qualitatively and quantitatively, through a designed experiment approach, the parameters relevance. SEM magnification was found to account by far for the largest contribution on both parameters under consideration. Optimal instrument settings were also identified.",

keywords = "SEM",

author = "Lorenzo Carli and Gianfranco Genta and Angela Cantatore and Giulio Barbato and {De Chiffre}, Leonardo and Raffaello Levi",

year = "2010",

language = "English",

isbn = "978-0-9553082-8-4",

volume = "1",

pages = "192--195",

booktitle = "Proceedings of the 10th euspen International Conference",

note = "10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010 ; Conference date: 18-05-2008 Through 22-05-2008",

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Carli, L, Genta, G, Cantatore, A, Barbato, G, De Chiffre, L & Levi, R 2010, Experimental investigation on the influence of instrument settings on pixel size and nonlinearity in SEM image formation. in Proceedings of the 10th euspen International Conference. vol. 1, pp. 192-195, 10th International Conference of the European Society for Precision Engineering and Nanotechnology, Zürich, Switzerland, 18/05/2008.

Experimental investigation on the influence of instrument settings on pixel size and nonlinearity in SEM image formation. / Carli, Lorenzo; Genta, Gianfranco; Cantatore, Angela; Barbato, Giulio; De Chiffre, Leonardo; Levi, Raffaello.

Proceedings of the 10th euspen International Conference. Vol. 1 2010. p. 192-195.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - Experimental investigation on the influence of instrument settings on pixel size and nonlinearity in SEM image formation

AU - Carli, Lorenzo

AU - Genta, Gianfranco

AU - Cantatore, Angela

AU - Barbato, Giulio

AU - De Chiffre, Leonardo

AU - Levi, Raffaello

N1 - Conference code: 10

PY - 2010

Y1 - 2010

N2 - The work deals with an experimental investigation on the influence of three Scanning Electron Microscope (SEM) instrument settings, accelerating voltage, spot size and magnification, on the image formation process. Pixel size and nonlinearity were chosen as output parameters related to image quality and resolution. A silicon grating calibrated artifact was employed to investigate qualitatively and quantitatively, through a designed experiment approach, the parameters relevance. SEM magnification was found to account by far for the largest contribution on both parameters under consideration. Optimal instrument settings were also identified.

AB - The work deals with an experimental investigation on the influence of three Scanning Electron Microscope (SEM) instrument settings, accelerating voltage, spot size and magnification, on the image formation process. Pixel size and nonlinearity were chosen as output parameters related to image quality and resolution. A silicon grating calibrated artifact was employed to investigate qualitatively and quantitatively, through a designed experiment approach, the parameters relevance. SEM magnification was found to account by far for the largest contribution on both parameters under consideration. Optimal instrument settings were also identified.

KW - SEM

M3 - Article in proceedings

SN - 978-0-9553082-8-4

VL - 1

SP - 192

EP - 195

BT - Proceedings of the 10th euspen International Conference

T2 - 10th International Conference of the European Society for Precision Engineering and Nanotechnology

Y2 - 18 May 2008 through 22 May 2008

ER -