Experimental investigation on 3D-SEM reconstructions of a wire gauge using stereo-pair technique

In this work an experimental investigation is addressed concerning 3D-SEM reconstructions obtained from the so-called stereo-pair technique. Three-dimensional topography of an object can be derived from two SEM images acquired from two different angles, through item rotation by means of the SEM stage. A wire gauge with a 250 μm reference diameter was adopted as calibrated artefact to perform an uncertainty evaluation of the diameter estimate, in terms of input parameters required by commercial software performing stereophotogrammetry. Systematic exploration of sample space was performed resorting to factorial experimentation and statistical analysis of results.