Experimental investigation on 3D-SEM reconstructions of a wire gauge using stereo-pair technique

Lorenzo Carli, G. Genta, Angela Cantatore, G. Barbato, Leonardo De Chiffre, R. Levi

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Abstract

In this work an experimental investigation is addressed concerning 3D-SEM reconstructions obtained from the so-called stereo-pair technique. Three-dimensional topography of an object can be derived from two SEM images acquired from two different angles, through item rotation by means of the SEM stage. A wire gauge with a 250 μm reference diameter was adopted as calibrated artefact to perform an uncertainty evaluation of the diameter estimate, in terms of input parameters required by commercial software performing stereophotogrammetry. Systematic exploration of sample space was performed resorting to factorial experimentation and statistical analysis of results.
Original languageEnglish
Title of host publicationProceedings of 11th International Conference of the European Society for Precision Engineering & Nano Technology
Publishereuspen
Publication date2011
Publication statusPublished - 2011
Event11th International Conference of the European Society for Precision Engineering and Nanotechnology - Como, Italy
Duration: 23 May 201127 May 2011
Conference number: 11
http://www.como2011.euspen.eu/

Conference

Conference11th International Conference of the European Society for Precision Engineering and Nanotechnology
Number11
CountryItaly
CityComo
Period23/05/201127/05/2011
Internet address

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