In this work an experimental investigation is addressed concerning 3D-SEM reconstructions obtained from the so-called stereo-pair technique. Three-dimensional topography of an object can be derived from two SEM images acquired from two different angles, through item rotation by means of the SEM stage. A wire gauge with a 250 μm reference diameter was adopted as calibrated artefact to perform an uncertainty evaluation of the diameter estimate, in terms of input parameters required by commercial software performing stereophotogrammetry. Systematic exploration of sample space was performed resorting to factorial experimentation and statistical analysis of results.
|Title of host publication||Proceedings of 11th International Conference of the European Society for Precision Engineering & Nano Technology|
|Publication status||Published - 2011|
|Event||11th International Conference of the European Society for Precision Engineering and Nanotechnology - Como, Italy|
Duration: 23 May 2011 → 27 May 2011
Conference number: 11
|Conference||11th International Conference of the European Society for Precision Engineering and Nanotechnology|
|Period||23/05/2011 → 27/05/2011|