Experimental results are presented regarding the influence of bubble formation on the capillary filling speed of water in SiO2 nanoslits with heights ranging from 33 to 158 nm. The formation of an isolated pinned bubble in a nanoslit with a height of 111 nm causes an immediate decrease in the filling speed. In nanoslits with heights below 100 nm, pinned bubbles are continuously formed at the advancing liquid meniscus. This observed increase in bubble density, which increases the fluidic resistance, quantitatively coincides with an observed reduction of the filling speed during filling of nanoslits with heights below 100 nm
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