Experimental demonstration of a silicon-slot quasi-bound state in the continuum in near-infrared all-dielectric metasurfaces

J. F. Algorri, F. Dell'Olio, Y. Ding, F. Labbé, V. Dmitriev, J. M. López-Higuera, J. M. Sánchez-Pena, L. C. Andreani, M. Galli, D. C. Zografopoulos*

*Corresponding author for this work

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Abstract

We theoretically and experimentally investigate a metasurface supporting a silicon-slot quasi-bound state in the continuum (qBIC) mode resonating in the near-infrared spectrum. The metasurface is composed of circular slots etched in a silicon layer on a sapphire substrate. The symmetry of the metasurface unit cell is reduced in order to provide access to the symmetry-protected mode, whose properties are investigated by finite-element full-wave and eigenfrequency analysis. The measured transmittance spectra verify the excitation of the investigated qBIC mode with experimental quality factors exceeding 700. The near-field distribution of the resonant qBIC mode shows strong field confinement in the slots, leading to high sensitivity values for refractometry.

Original languageEnglish
Article number109199
JournalOptics and Laser Technology
Volume161
Number of pages7
ISSN0030-3992
DOIs
Publication statusPublished - 2023

Keywords

  • Biosensing
  • Bound states in the continuum
  • Metamaterials
  • Nanofabrication
  • Silicon metasurfaces
  • Symmetry-protected modes

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