Excitation and detection of silicon-based micro-mechanical
                resonators

Research output: Contribution to journal › Journal article › Research › peer-review

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@article{bb86fd8ca5f5481297b3237ba8d3b90a,

title = "Excitation and detection of silicon-based micro-mechanical resonators",

author = "Tilmans, \{H. A. C.\} and Siebe Bouwstra",

year = "1997",

language = "English",

volume = "9",

pages = "521--540",

journal = "Sensors and Materials",

issn = "0914-4935",

publisher = "M Y U Scientific Publishing Division",

}