Excitation and detection of silicon-based micro-mechanical resonators

H. A. C. Tilmans, Siebe Bouwstra

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalSensors and Materials
    Volume9
    Pages (from-to)521-540
    ISSN0914-4935
    Publication statusPublished - 1997

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