Evolutionary Design Optimization of MEMS: A Brief Review

Haoshen Zhu, Pan Wang, Zhun Fan

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	IEEE International Conference on Industrial Technology
Publication date	2010
ISBN (Print)	9781424456956
DOIs	https://doi.org/10.1109/ICIT.2010.5472635
Publication status	Published - 2010
Event	2010 IEEE International Conference on Industrial Technology - Via del Mar, Chile Duration: 14 Mar 2010 → 17 Mar 2010 https://ieeexplore.ieee.org/xpl/conhome/5465897/proceeding

Conference	2010 IEEE International Conference on Industrial Technology
Country/Territory	Chile
City	Via del Mar
Period	14/03/2010 → 17/03/2010
Internet address	https://ieeexplore.ieee.org/xpl/conhome/5465897/proceeding

Access to Document

@inproceedings{2578a424cd9d4c1a829fe262212dfa8d,

title = "Evolutionary Design Optimization of MEMS: A Brief Review",

author = "Haoshen Zhu and Pan Wang and Zhun Fan",

year = "2010",

doi = "10.1109/ICIT.2010.5472635",

language = "English",

isbn = "9781424456956",

booktitle = "IEEE International Conference on Industrial Technology",

note = "2010 IEEE International Conference on Industrial Technology, ICIT 2010 ; Conference date: 14-03-2010 Through 17-03-2010",

url = "https://ieeexplore.ieee.org/xpl/conhome/5465897/proceeding",

}

TY - GEN

T1 - Evolutionary Design Optimization of MEMS: A Brief Review

AU - Zhu, Haoshen

AU - Wang, Pan

AU - Fan, Zhun

PY - 2010

Y1 - 2010

U2 - 10.1109/ICIT.2010.5472635

DO - 10.1109/ICIT.2010.5472635

M3 - Article in proceedings

SN - 9781424456956

BT - IEEE International Conference on Industrial Technology

T2 - 2010 IEEE International Conference on Industrial Technology

Y2 - 14 March 2010 through 17 March 2010

ER -