Evaluation of activated Nitrogen species form an RF plasma nitrogen source by appearance mass spectrometry and by MBE growth

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of International COE Workshop on Nano Processes and Devices and their Applications
Number of pages	2
Publication date	2005
Pages	27-28
Publication status	Published - 2005
Externally published	Yes
Event	International COE Workshop on Nano Processes and Devices and their Applications - Nagoya, Japan Duration: 15 Dec 2005 → 16 Dec 2005 https://www.nuee.nagoya-u.ac.jp/HotTopics/index-e.php

Workshop	International COE Workshop on Nano Processes and Devices and their Applications
Country/Territory	Japan
City	Nagoya
Period	15/12/2005 → 16/12/2005
Internet address	https://www.nuee.nagoya-u.ac.jp/HotTopics/index-e.php

OpenUrl availability

@inbook{28d863bb56634c0b8dd5edbd385b74a5,

title = "Evaluation of activated Nitrogen species form an RF plasma nitrogen source by appearance mass spectrometry and by MBE growth",

author = "J. Osaka and Kumar, \{M. S.\} and H. Toyoda and T. Ishijima and Eugen Stamate and H. Sugai",

year = "2005",

language = "English",

pages = "27--28",

booktitle = "Proceedings of International COE Workshop on Nano Processes and Devices and their Applications",

note = "International COE Workshop on Nano Processes and Devices and their Applications ; Conference date: 15-12-2005 Through 16-12-2005",

url = "https://www.nuee.nagoya-u.ac.jp/HotTopics/index-e.php",

}

Osaka, J, Kumar, MS, Toyoda, H, Ishijima, T, Stamate, E & Sugai, H 2005, Evaluation of activated Nitrogen species form an RF plasma nitrogen source by appearance mass spectrometry and by MBE growth. in Proceedings of International COE Workshop on Nano Processes and Devices and their Applications. pp. 27-28, International COE Workshop on Nano Processes and Devices and their Applications, Nagoya, Japan, 15/12/2005.

Evaluation of activated Nitrogen species form an RF plasma nitrogen source by appearance mass spectrometry and by MBE growth. / Osaka, J.; Kumar, M. S.; Toyoda, H. et al.
Proceedings of International COE Workshop on Nano Processes and Devices and their Applications. 2005. p. 27-28.

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Research › peer-review

TY - ABST

T1 - Evaluation of activated Nitrogen species form an RF plasma nitrogen source by appearance mass spectrometry and by MBE growth

AU - Osaka, J.

AU - Kumar, M. S.

AU - Toyoda, H.

AU - Ishijima, T.

AU - Stamate, Eugen

AU - Sugai, H.

PY - 2005

Y1 - 2005

M3 - Conference abstract in proceedings

SP - 27

EP - 28

BT - Proceedings of International COE Workshop on Nano Processes and Devices and their Applications

T2 - International COE Workshop on Nano Processes and Devices and their Applications

Y2 - 15 December 2005 through 16 December 2005

ER -