Evaluation of activated Nitrogen species form an RF plasma nitrogen source by appearance mass spectrometry and by MBE growth

J. Osaka, M. S. Kumar, H. Toyoda, T. Ishijima, Eugen Stamate, H. Sugai

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsResearchpeer-review

Original languageEnglish
Title of host publicationProceedings of International COE Workshop on Nano Processes and Devices and their Applications
Number of pages2
Publication date2005
Pages27-28
Publication statusPublished - 2005
Externally publishedYes
EventInternational COE Workshop on Nano Processes and Devices and their Applications - Nagoya, Japan
Duration: 1 Jan 2005 → …

Workshop

WorkshopInternational COE Workshop on Nano Processes and Devices and their Applications
CountryJapan
CityNagoya
Period01/01/2005 → …

Cite this

Osaka, J., Kumar, M. S., Toyoda, H., Ishijima, T., Stamate, E., & Sugai, H. (2005). Evaluation of activated Nitrogen species form an RF plasma nitrogen source by appearance mass spectrometry and by MBE growth. In Proceedings of International COE Workshop on Nano Processes and Devices and their Applications (pp. 27-28)