@inbook{28d863bb56634c0b8dd5edbd385b74a5,
title = "Evaluation of activated Nitrogen species form an RF plasma nitrogen source by appearance mass spectrometry and by MBE growth",
author = "J. Osaka and Kumar, {M. S.} and H. Toyoda and T. Ishijima and Eugen Stamate and H. Sugai",
year = "2005",
language = "English",
pages = "27--28",
booktitle = "Proceedings of International COE Workshop on Nano Processes and Devices and their Applications",
note = "International COE Workshop on Nano Processes and Devices and their Applications ; Conference date: 01-01-2005",
}