Eutectic bonds on wafer scale by thin film multilayers

Carsten Christensen, Siebe Bouwstra

    Research output: Chapter in Book/Report/Conference proceedingBook chapterResearchpeer-review

    Original languageEnglish
    Title of host publicationMicromachining and Microfabrication Process technology II: Proc. of SPIE, 2879
    Place of PublicationAustin, Tex.
    Publication date1996
    Pages288-290
    Publication statusPublished - 1996

    Cite this

    Christensen, C., & Bouwstra, S. (1996). Eutectic bonds on wafer scale by thin film multilayers. In Micromachining and Microfabrication Process technology II: Proc. of SPIE, 2879 (pp. 288-290). Austin, Tex..