| Original language | English |
|---|---|
| Title of host publication | Micromachining and Microfabrication Process technology II: Proc. of SPIE, 2879 |
| Place of Publication | Austin, Tex. |
| Publication date | 1996 |
| Pages | 288-290 |
| Publication status | Published - 1996 |
Eutectic bonds on wafer scale by thin film multilayers
Carsten Christensen, Siebe Bouwstra
Research output: Chapter in Book/Report/Conference proceeding › Book chapter › Research › peer-review