| Original language | English |
|---|
| Place of Publication | Hong Kong |
|---|---|
| Publisher | City University of Hong Kong Press |
| Publication status | Published - 2007 |
Keywords
- Ion Milling Machines
- Epitaxy
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Etch Rate Prediction for Ion Milling Machines
- Poul G. Hjorth
- , Paul Dellar
- , Chris Bohun
- , John Ockendon
- Imperial College London
- Ontario Tech University
- University of Oxford
Research output: Book/Report › Report › Research › peer-review