| Original language | English |
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| Place of Publication | Hong Kong |
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| Publisher | City University of Hong Kong Press |
| Publication status | Published - 2007 |
Keywords
- Ion Milling Machines
- Epitaxy
Etch Rate Prediction for Ion Milling Machines
Poul G. Hjorth, Paul Dellar, Chris Bohun, John Ockendon
Research output: Book/Report › Report › Research › peer-review