Error sources in Atomic Force Microscopy for dimensional measurements

Lorenzo Carli, Francesco Marinello, Simone Carmignato, Alessandro Voltan, Enrico Savio, Leonardo De Chiffre

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of the 8. AITeM Conference
Volume	1
Publication date	2007
Pages	95-96
ISBN (Print)	88-7957-264-4
Publication status	Published - 2007
Event	8th Associazione Italiana Tecnologia Meccanica conference - Montecatini, Italy Duration: 10 Sept 2007 → 12 Sept 2007 Conference number: 8

Conference	8th Associazione Italiana Tecnologia Meccanica conference
Number	8
Country/Territory	Italy
City	Montecatini
Period	10/09/2007 → 12/09/2007

Keywords

@inproceedings{f12c4acf2c3c4cdaab0167c3d9dd22f1,

title = "Error sources in Atomic Force Microscopy for dimensional measurements",

keywords = "error sources, dimensional measurements, Atomic Force Microscope",

author = "Lorenzo Carli and Francesco Marinello and Simone Carmignato and Alessandro Voltan and Enrico Savio and {De Chiffre}, Leonardo",

year = "2007",

language = "English",

isbn = "88-7957-264-4",

volume = "1",

pages = "95--96",

booktitle = "Proceedings of the 8. AITeM Conference",

note = "8th Associazione Italiana Tecnologia Meccanica conference, AiTeM ; Conference date: 10-09-2007 Through 12-09-2007",

}

TY - GEN

T1 - Error sources in Atomic Force Microscopy for dimensional measurements

AU - Carli, Lorenzo

AU - Marinello, Francesco

AU - Carmignato, Simone

AU - Voltan, Alessandro

AU - Savio, Enrico

AU - De Chiffre, Leonardo

N1 - Conference code: 8

PY - 2007

Y1 - 2007

KW - error sources

KW - dimensional measurements

KW - Atomic Force Microscope

M3 - Article in proceedings

SN - 88-7957-264-4

VL - 1

SP - 95

EP - 96

BT - Proceedings of the 8. AITeM Conference

T2 - 8th Associazione Italiana Tecnologia Meccanica conference

Y2 - 10 September 2007 through 12 September 2007

ER -