Error sources in Atomic Force Microscopy for dimensional measurements

Lorenzo Carli, Francesco Marinello, Simone Carmignato, Alessandro Voltan, Enrico Savio, Leonardo De Chiffre

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Original languageEnglish
Title of host publicationProceedings of the 8. AITeM Conference
Volume1
Publication date2007
Pages95-96
ISBN (Print)88-7957-264-4
Publication statusPublished - 2007
EventAssociazione Italiana Tecnologia Meccanica conference - Montecatini, Italy
Duration: 1 Jan 2007 → …
Conference number: 8

Conference

ConferenceAssociazione Italiana Tecnologia Meccanica conference
Number8
CityMontecatini, Italy
Period01/01/2007 → …

Keywords

  • error sources
  • dimensional measurements
  • Atomic Force Microscope

Cite this

Carli, L., Marinello, F., Carmignato, S., Voltan, A., Savio, E., & De Chiffre, L. (2007). Error sources in Atomic Force Microscopy for dimensional measurements. In Proceedings of the 8. AITeM Conference (Vol. 1, pp. 95-96)