Error sources in atomic force microscopy for dimensional measurements: Taxonomy and modeling

F. Marinello, A. Voltan, E. Savio, S. Carmignato, Leonardo De Chiffre

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    This paper aimed at identifying the error sources that occur in dimensional measurements performed using atomic force microscopy. In particular, a set of characterization techniques for errors quantification is presented. The discussion on error sources is organized in four main categories: scanning system, tip-surface interaction, environment, and data processing. The discussed errors include scaling effects, squareness errors, hysteresis, creep, tip convolution, and thermal drift. A mathematical model of the measurement system is eventually described, as a reference basis for errors characterization, with an applicative example on a reference silicon grating. Copyright © 2010 by ASME.
    Original languageEnglish
    JournalJournal of Manufacturing Science and Engineering
    Volume132
    Issue number3
    Pages (from-to)0309031-0309038
    ISSN1087-1357
    DOIs
    Publication statusPublished - 2010

    Keywords

    • Dimensional metrology
    • Atomic force microscopy
    • Micromanufacturing

    Fingerprint

    Dive into the research topics of 'Error sources in atomic force microscopy for dimensional measurements: Taxonomy and modeling'. Together they form a unique fingerprint.

    Cite this