Error sources in atomic force microscopy for dimensional measurements: Taxonomy and modeling

F. Marinello, A. Voltan, E. Savio, S. Carmignato, Leonardo De Chiffre

Research output: Contribution to journalJournal articleResearchpeer-review

Abstract

This paper aimed at identifying the error sources that occur in dimensional measurements performed using atomic force microscopy. In particular, a set of characterization techniques for errors quantification is presented. The discussion on error sources is organized in four main categories: scanning system, tip-surface interaction, environment, and data processing. The discussed errors include scaling effects, squareness errors, hysteresis, creep, tip convolution, and thermal drift. A mathematical model of the measurement system is eventually described, as a reference basis for errors characterization, with an applicative example on a reference silicon grating. Copyright © 2010 by ASME.
Original languageEnglish
JournalJournal of Manufacturing Science and Engineering
Volume132
Issue number3
Pages (from-to)0309031-0309038
ISSN1087-1357
DOIs
Publication statusPublished - 2010

Keywords

  • Dimensional metrology
  • Atomic force microscopy
  • Micromanufacturing

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