Abstract
This paper aimed at identifying the error sources that occur in dimensional measurements performed using atomic force microscopy. In particular, a set of characterization techniques for errors quantification is presented. The discussion on error sources is organized in four main categories: scanning system, tip-surface interaction, environment, and data processing. The discussed errors include scaling effects, squareness errors, hysteresis, creep, tip convolution, and thermal drift. A mathematical model of the measurement system is eventually described, as a reference basis for errors characterization, with an applicative example on a reference silicon grating. Copyright © 2010 by ASME.
Original language | English |
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Journal | Journal of Manufacturing Science and Engineering |
Volume | 132 |
Issue number | 3 |
Pages (from-to) | 0309031-0309038 |
ISSN | 1087-1357 |
DOIs | |
Publication status | Published - 2010 |
Keywords
- Dimensional metrology
- Atomic force microscopy
- Micromanufacturing