Erratum: Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films (2021) 39(043408) DOI: 10.1116/6.0000884)

Leonid Yu Beliaev^*, Evgeniy Shkondin, Andrei V. Lavrinenko, Osamu Takayama

^*Corresponding author for this work

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2021
Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths
Beliaev, L. Y., Shkondin, E., Lavrinenko, A. V. & Takayama, O., 2021, In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. 39, 4, 9 p., 043408.
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