Erratum: Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films (2021) 39(043408) DOI: 10.1116/6.0000884)

Leonid Yu Beliaev*, Evgeniy Shkondin, Andrei V. Lavrinenko, Osamu Takayama

*Corresponding author for this work

Research output: Contribution to journal › Comment/debate › Research › peer-review

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