Erratum: Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films (2021) 39(043408) DOI: 10.1116/6.0000884)

Leonid Yu Beliaev; Evgeniy Shkondin; Andrei V. Lavrinenko; Osamu Takayama

doi:10.1116/6.0001574

Erratum: Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films (2021) 39(043408) DOI: 10.1116/6.0000884)

Leonid Yu Beliaev^*, Evgeniy Shkondin, Andrei V. Lavrinenko, Osamu Takayama

^*Corresponding author for this work

Research output: Contribution to journal › Comment/debate › Research › peer-review

Abstract

Original language	English
Article number	027001
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	40
Issue number	2
Number of pages	4
ISSN	0734-2101
DOIs	https://doi.org/10.1116/6.0001574
Publication status	Published - 2022

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Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths
Beliaev, L. Y., Shkondin, E., Lavrinenko, A. V. & Takayama, O., 2021, In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. 39, 4, 9 p., 043408.
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Beliaev, L. Y., Shkondin, E., Lavrinenko, A. V., & Takayama, O. (2022). Erratum: Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films (2021) 39(043408) DOI: 10.1116/6.0000884). Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 40(2), Article 027001. https://doi.org/10.1116/6.0001574

Beliaev, Leonid Yu ; Shkondin, Evgeniy ; Lavrinenko, Andrei V. et al. / Erratum : Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films (2021) 39(043408) DOI: 10.1116/6.0000884). In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 2022 ; Vol. 40, No. 2.

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author = "Beliaev, {Leonid Yu} and Evgeniy Shkondin and Lavrinenko, {Andrei V.} and Osamu Takayama",

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Beliaev, LY , Shkondin, E , Lavrinenko, AV & Takayama, O 2022, 'Erratum: Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films (2021) 39(043408) DOI: 10.1116/6.0000884)', Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, vol. 40, no. 2, 027001. https://doi.org/10.1116/6.0001574

Erratum: Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films (2021) 39(043408) DOI: 10.1116/6.0000884). / Beliaev, Leonid Yu ; Shkondin, Evgeniy ; Lavrinenko, Andrei V. et al.
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 40, No. 2, 027001, 2022.

Research output: Contribution to journal › Comment/debate › Research › peer-review

TY - JOUR

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T2 - Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films (2021) 39(043408) DOI: 10.1116/6.0000884)

AU - Beliaev, Leonid Yu

AU - Shkondin, Evgeniy

AU - Lavrinenko, Andrei V.

AU - Takayama, Osamu

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M1 - 027001

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Beliaev LY , Shkondin E , Lavrinenko AV , Takayama O. Erratum: Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films (2021) 39(043408) DOI: 10.1116/6.0000884). Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 2022;40(2):027001. doi: 10.1116/6.0001574