Erosion of Volatile Elemental Condensed Gases by keV Electron and Light-Ion Bombardment

Jørgen Schou

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    Abstract

    Erosion of the most volatile elemental gases by kcV electron and
    light-ion bombardment has been studied at the experimental setup at Risø.
    The present work includes frozen neon, argon, krypton, nitrogen, oxygen and
    three hydrogen isotopes, deuterium, hydrogen deuteride and hydrogen. The yield of these condensed gases has been measured as a function of film thickness and primary energy for almost all combinations of primary particles (1-3 keV electrons, 5-10 keV hydrogen- and helium ions) and ices. These and other existing results show that there are substantial common features for the sputtering of frozen elemental gases. Within the two groups, the solid rare gases and the solid molecular gases, the similarity is striking. The hydrogenic solids deviate in some respects from the other elements. The processes that liberate kinetic energy for the particle ejection in sputtering are characteristic of the specific gas.
    Original languageEnglish
    Place of PublicationRoskilde
    PublisherRisø National Labratory
    Number of pages162
    ISBN (Print)87-550-1737-1
    Publication statusPublished - 1991
    SeriesDenmark. Forskningscenter Risoe. Risoe-R
    Number591
    ISSN0106-2840

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