Original language | English |
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Title of host publication | Proceedings of the Symposium on Sputtering |
Number of pages | 920 |
Place of Publication | Wien |
Publisher | Institut für Allgemeine Physik |
Publication date | 1980 |
Pages | 822-831 |
Publication status | Published - 1980 |
Event | Symposium on Sputtering - Perchtolsdorf/Wien, Austria Duration: 28 Apr 1980 → 30 Apr 1980 |
Conference
Conference | Symposium on Sputtering |
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Country/Territory | Austria |
City | Perchtolsdorf/Wien |
Period | 28/04/1980 → 30/04/1980 |