Epoxy based photoresist/carbon nanoparticle composites

We have fabricated composites of SU-8 polymer and three different types of carbon nanoparticles (NPs) using ultrasonic mixing. Structures of composite thin films have been patterned on a characterization chip with standard UV photolithography. Using a four-point bending probe, a well defined stress is applied to the composite thin film and we have demonstrated that the composites are piezoresistive. Stable gauge factors of 5-9 have been measured, but we have also observed piezoresistive responses with gauge factors as high as 50. As SU-8 is much softer than silicon and the gauge factor of the composite material is relatively high, carbon nanoparticle doped SU-8 is a valid candidate for the piezoresistive readout in polymer based cantilever sensors, with potentially higher sensitivity than silicon based cantilevers.