TY - JOUR
T1 - Epoxy based photoresist/carbon nanoparticle composites
AU - Lillemose, Michael
AU - Gammelgaard, Lauge
AU - Richter, Jacob
AU - Thomsen, Erik Vilain
AU - Boisen, Anja
PY - 2008
Y1 - 2008
N2 - We have fabricated composites of SU-8 polymer and three different types of carbon nanoparticles (NPs) using ultrasonic mixing. Structures of composite thin films have been patterned on a characterization chip with standard UV photolithography. Using a four-point bending probe, a well defined stress is applied to the composite thin film and we have demonstrated that the composites are piezoresistive. Stable gauge factors of 5-9 have been measured, but we have also observed piezoresistive responses with gauge factors as high as 50. As SU-8 is much softer than silicon and the gauge factor of the composite material is relatively high, carbon nanoparticle doped SU-8 is a valid candidate for the piezoresistive readout in polymer based cantilever sensors, with potentially higher sensitivity than silicon based cantilevers.
AB - We have fabricated composites of SU-8 polymer and three different types of carbon nanoparticles (NPs) using ultrasonic mixing. Structures of composite thin films have been patterned on a characterization chip with standard UV photolithography. Using a four-point bending probe, a well defined stress is applied to the composite thin film and we have demonstrated that the composites are piezoresistive. Stable gauge factors of 5-9 have been measured, but we have also observed piezoresistive responses with gauge factors as high as 50. As SU-8 is much softer than silicon and the gauge factor of the composite material is relatively high, carbon nanoparticle doped SU-8 is a valid candidate for the piezoresistive readout in polymer based cantilever sensors, with potentially higher sensitivity than silicon based cantilevers.
KW - electrical properties
KW - nano composites
U2 - 10.1016/j.compscitech.2008.01.017
DO - 10.1016/j.compscitech.2008.01.017
M3 - Journal article
SN - 0266-3538
VL - 68
SP - 1831
EP - 1836
JO - Composites Science and Technology
JF - Composites Science and Technology
IS - 7-8
ER -