Epoxy based photoresist/carbon nanoparticle composites

Michael Lillemose, Lauge Gammelgaard, Jacob Richter, Erik Vilain Thomsen, Anja Boisen

    Research output: Contribution to journalJournal articleResearchpeer-review


    We have fabricated composites of SU-8 polymer and three different types of carbon nanoparticles (NPs) using ultrasonic mixing. Structures of composite thin films have been patterned on a characterization chip with standard UV photolithography. Using a four-point bending probe, a well defined stress is applied to the composite thin film and we have demonstrated that the composites are piezoresistive. Stable gauge factors of 5-9 have been measured, but we have also observed piezoresistive responses with gauge factors as high as 50. As SU-8 is much softer than silicon and the gauge factor of the composite material is relatively high, carbon nanoparticle doped SU-8 is a valid candidate for the piezoresistive readout in polymer based cantilever sensors, with potentially higher sensitivity than silicon based cantilevers.
    Original languageEnglish
    JournalComposites Science and Technology
    Issue number7-8
    Pages (from-to)1831-1836
    Publication statusPublished - 2008


    • electrical properties
    • nano composites


    Dive into the research topics of 'Epoxy based photoresist/carbon nanoparticle composites'. Together they form a unique fingerprint.

    Cite this