Environmental sensors based on micromachined cantilevers with                integrated read-out

Anja Boisen; Jacob Thaysen; Henriette Jensenius; Ole Hansen

doi:10.1016/S0304-3991(99)00148-5

Environmental sensors based on micromachined cantilevers with integrated read-out

Anja Boisen, Jacob Thaysen, Henriette Jensenius, Ole Hansen

Research output: Contribution to journal › Journal article › Research › peer-review

Abstract

An AFM probe with integrated piezoresistive read-out has been developed and applied as a cantilever-based environmental sensor. The probe has a built-in reference cantilever, which makes it possible to subtract background drift directly in the measurement. Moreover, the integrated read-out facilitates measurements in liquid. The probe has been successfully implemented in gaseous as well as in liquid experiments. For example, the probe has been used as an accurate and minute thermal sensor and as a humidity sensor. In liquid, the probe has been used to detect the presence of alcohol in water. (C) 2000 Elsevier Science B.V. All rights reserved.

Original language	English
Journal	Ultramicroscopy
Volume	82
Issue number	1-4
Pages (from-to)	11-16
ISSN	0304-3991
DOIs	https://doi.org/10.1016/S0304-3991(99)00148-5
Publication status	Published - 2000

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title = "Environmental sensors based on micromachined cantilevers with integrated read-out",

abstract = "An AFM probe with integrated piezoresistive read-out has been developed and applied as a cantilever-based environmental sensor. The probe has a built-in reference cantilever, which makes it possible to subtract background drift directly in the measurement. Moreover, the integrated read-out facilitates measurements in liquid. The probe has been successfully implemented in gaseous as well as in liquid experiments. For example, the probe has been used as an accurate and minute thermal sensor and as a humidity sensor. In liquid, the probe has been used to detect the presence of alcohol in water. (C) 2000 Elsevier Science B.V. All rights reserved. ",

author = "Anja Boisen and Jacob Thaysen and Henriette Jensenius and Ole Hansen",

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AU - Boisen, Anja

AU - Thaysen, Jacob

AU - Jensenius, Henriette

AU - Hansen, Ole

PY - 2000

Y1 - 2000

N2 - An AFM probe with integrated piezoresistive read-out has been developed and applied as a cantilever-based environmental sensor. The probe has a built-in reference cantilever, which makes it possible to subtract background drift directly in the measurement. Moreover, the integrated read-out facilitates measurements in liquid. The probe has been successfully implemented in gaseous as well as in liquid experiments. For example, the probe has been used as an accurate and minute thermal sensor and as a humidity sensor. In liquid, the probe has been used to detect the presence of alcohol in water. (C) 2000 Elsevier Science B.V. All rights reserved.

AB - An AFM probe with integrated piezoresistive read-out has been developed and applied as a cantilever-based environmental sensor. The probe has a built-in reference cantilever, which makes it possible to subtract background drift directly in the measurement. Moreover, the integrated read-out facilitates measurements in liquid. The probe has been successfully implemented in gaseous as well as in liquid experiments. For example, the probe has been used as an accurate and minute thermal sensor and as a humidity sensor. In liquid, the probe has been used to detect the presence of alcohol in water. (C) 2000 Elsevier Science B.V. All rights reserved.

U2 - 10.1016/S0304-3991(99)00148-5

DO - 10.1016/S0304-3991(99)00148-5

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