Environmental sensors based on micromachined cantilevers with integrated read-out

Anja Boisen, Jacob Thaysen, Henriette Jensenius, Ole Hansen

    Research output: Contribution to journalJournal articleResearchpeer-review


    An AFM probe with integrated piezoresistive read-out has been developed and applied as a cantilever-based environmental sensor. The probe has a built-in reference cantilever, which makes it possible to subtract background drift directly in the measurement. Moreover, the integrated read-out facilitates measurements in liquid. The probe has been successfully implemented in gaseous as well as in liquid experiments. For example, the probe has been used as an accurate and minute thermal sensor and as a humidity sensor. In liquid, the probe has been used to detect the presence of alcohol in water. (C) 2000 Elsevier Science B.V. All rights reserved.
    Original languageEnglish
    Issue number1-4
    Pages (from-to)11-16
    Publication statusPublished - 2000


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