Enhancing Plasma Surface Modification using high Intensity and high Power Ultrasonic Acoustic Waves

Niels Krebs (Inventor), Alexander Bardenshtein (Inventor), Yukihiro Kusano (Inventor), Henrik Bindslev (Inventor), Henrik Junge Mortensen (Inventor)

    Research output: Patent

    Abstract

    This invention relates to a plasma surface modification process (and a corresponding a system) of a solid object (100) comprising creating plasma (104) by a plasma source (106), application of the plasma (104) to at least a part of a surface (314) of the solid object (100), generating ultrasonic high intensity and high power acoustic waves (102) by at least one ultrasonic high intensity and high power acoustic wave generator (101 ), wherein the ultrasonic acoustic waves are directed to propagate towards said surface (314) of the object (100) so that a laminar boundary layer (313) of a gas or a mixture of gases (500) flow in contact with said solid object (100) is thinned or destructed for at least a part of said surface (314). In this way, the plasma can more efficiently access and influence the surface of the solid object to be treated by the plasma, which speeds the process time up significantly.
    Original languageEnglish
    Patent numberEP2153704
    Filing date17/02/2010
    Publication statusPublished - 2010

    Bibliographical note

    Patent:
    No.: WO2008138901


    Patent:
    No.: US2010304146


    Patent:
    No.: WO2008138915


    Patent:
    No.: EP2153705


    Patent:
    No.: CN101743785

    Keywords

    • Plasma processing
    • Fusion energy

    Cite this

    Krebs, N., Bardenshtein, A., Kusano, Y., Bindslev, H., & Mortensen, H. J. (2010). Enhancing Plasma Surface Modification using high Intensity and high Power Ultrasonic Acoustic Waves. (Patent No. EP2153704).