Enhancing Automated Defect Detection in High-Throughput SEM: Balancing Throughput, Resolution, and Accuracy in Large-Area Analysis

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Research output: Contribution to journal › Conference abstract in journal › Research › peer-review

Original language	English
Article number	2234
Journal	Microscopy and Microanalysis
Volume	31
Issue number	7
ISSN	1431-9276
DOIs	https://doi.org/10.1093/mam/ozaf048.1097
Publication status	Published - 2025

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title = "Enhancing Automated Defect Detection in High-Throughput SEM: Balancing Throughput, Resolution, and Accuracy in Large-Area Analysis",

author = "Christina K{\"o}nig and Joerg Jinschek",

year = "2025",

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journal = "Microscopy and Microanalysis",

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AU - König, Christina

AU - Jinschek, Joerg

PY - 2025

Y1 - 2025

U2 - 10.1093/mam/ozaf048.1097

DO - 10.1093/mam/ozaf048.1097

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JO - Microscopy and Microanalysis

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