Enhanced sputtering of solid neon by molecular ions

O. Ellegaard; Jørgen Schou; B. Stenum; H. Sørensen; R. Pedrys

doi:10.1016/0168-583X(92)95871-N

Enhanced sputtering of solid neon by molecular ions

O. Ellegaard, Jørgen Schou, B. Stenum, H. Sørensen, R. Pedrys

Research output: Contribution to journal › Journal article › Research › peer-review

Abstract

A pronounced molecular effect in the sputtering of solid neon by molecular medium-mass ions has been measured using a quartz crystal microbalance. The bombarding ions were 5–10 keV N+ and N₂+ ions. The measured high yields are discussed in terms of existing spike or “gas-flow” models. In their present form none of these models offers an adequate description of the measured high yield system.

Original language	English
Journal	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume	67
Issue number	1-4
Pages (from-to)	549-553
ISSN	0168-583X
DOIs	https://doi.org/10.1016/0168-583X(92)95871-N
Publication status	Published - 1992

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title = "Enhanced sputtering of solid neon by molecular ions",

abstract = "A pronounced molecular effect in the sputtering of solid neon by molecular medium-mass ions has been measured using a quartz crystal microbalance. The bombarding ions were 5–10 keV N+ and N2+ ions. The measured high yields are discussed in terms of existing spike or “gas-flow” models. In their present form none of these models offers an adequate description of the measured high yield system.",

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T1 - Enhanced sputtering of solid neon by molecular ions

AU - Ellegaard, O.

AU - Schou, Jørgen

AU - Stenum, B.

AU - Sørensen, H.

AU - Pedrys, R.

PY - 1992

Y1 - 1992

N2 - A pronounced molecular effect in the sputtering of solid neon by molecular medium-mass ions has been measured using a quartz crystal microbalance. The bombarding ions were 5–10 keV N+ and N2+ ions. The measured high yields are discussed in terms of existing spike or “gas-flow” models. In their present form none of these models offers an adequate description of the measured high yield system.

AB - A pronounced molecular effect in the sputtering of solid neon by molecular medium-mass ions has been measured using a quartz crystal microbalance. The bombarding ions were 5–10 keV N+ and N2+ ions. The measured high yields are discussed in terms of existing spike or “gas-flow” models. In their present form none of these models offers an adequate description of the measured high yield system.

KW - Materialers atomare struktur og egenskaber; Optik og fluid dynamik

U2 - 10.1016/0168-583X(92)95871-N

DO - 10.1016/0168-583X(92)95871-N

M3 - Journal article

SN - 0168-583X

VL - 67

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EP - 553

JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

IS - 1-4

ER -

Enhanced sputtering of solid neon by molecular ions

Abstract

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