Enhanced functionality of cantilever based mass sensors using higher modes and functionalized particles

Søren Dohn, Rasmus Kousholt Sandberg, Winnie Edith Svendsen, Anja Boisen

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    Abstract

    By positioning a single gold-particle at different locations along the length axis on a cantilever based mass sensor, we have investigated the effect of mass position on the mass responsivity and compared the results to simulations. A significant improvement in quality factor and responsivity was achieved by operating the cantilever in the 4th bending mode, thereby increasing the intrinsic sensitivity. It is shown that the use of higher bending modes grants a spatial resolution and thereby enhances the functionality of the cantilever based mass sensor.
    Original languageEnglish
    Title of host publicationThe 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.
    Volume1
    PublisherIEEE
    Publication date2005
    Pages636-639
    ISBN (Print)0-7803-8994-8
    DOIs
    Publication statusPublished - 2005
    Event13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '05) - Seoul, Korea, Republic of
    Duration: 1 Jan 2005 → …
    Conference number: 13

    Conference

    Conference13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '05)
    Number13
    CountryKorea, Republic of
    CitySeoul
    Period01/01/2005 → …

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