Abstract
By positioning a single gold-particle at different locations along the length axis on a cantilever based mass sensor, we have investigated the effect of mass position on the mass responsivity and compared the results to simulations. A significant improvement in quality factor and responsivity was achieved by operating the cantilever in the 4th bending mode, thereby increasing the intrinsic sensitivity. It is shown that the use of higher bending modes grants a spatial resolution and thereby enhances the functionality of the cantilever based mass sensor.
Original language | English |
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Title of host publication | The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. |
Volume | 1 |
Publisher | IEEE |
Publication date | 2005 |
Pages | 636-639 |
ISBN (Print) | 0-7803-8994-8 |
DOIs | |
Publication status | Published - 2005 |
Event | 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '05) - Seoul, Korea, Republic of Duration: 1 Jan 2005 → … Conference number: 13 |
Conference
Conference | 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '05) |
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Number | 13 |
Country/Territory | Korea, Republic of |
City | Seoul |
Period | 01/01/2005 → … |