By positioning a single gold particle at different locations along the length axis on a cantilever based mass sensor, we have investigated the effect of mass position on the mass responsivity and compared the results to simulations. A significant improvement in quality factor and responsivity was achieved by operating the cantilever in the fourth bending mode thereby increasing the intrinsic sensitivity. It is shown that the use of higher bending modes grants a spatial resolution and thereby enhances the functionality of the cantilever based mass sensor. (c) 2005 American Institute of Physics.
Bibliographical noteCopyright (2005) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
Dohn, S., Sandberg, R. K., Svendsen, W. E., & Boisen, A. (2005). Enhanced functionality of cantilever based mass sensors using higher modes. Applied Physics Letters, 86(23), 233501. https://doi.org/10.1063/1.1948521