Emerging trends in surface metrology

P.M. Lonardo; D.A. Lucca; Leonardo De Chiffre

doi:10.1016/S0007-8506(07)61708-9

Emerging trends in surface metrology

P.M. Lonardo, D.A. Lucca, Leonardo De Chiffre

Research output: Contribution to journal › Journal article › Research › peer-review

Abstract

Recent advancements and some emerging trends in the methods and instruments used for surface and near surface characterisation are presented, considering the measurement of both topography and physical properties. In particular, surfaces that present difficulties in measurement or require new procedures are considered, with emphasis on measurements approaching the nanometre scale. Examples of new instruments and promising innovations for roughness measurement and surface integrity characterisation are presented. The new needs for tolerancing, traceability and calibration are also addressed.

Original language	English
Journal	C I R P Annals
Volume	51
Issue number	2
Pages (from-to)	701-723
ISSN	0007-8506
DOIs	https://doi.org/10.1016/S0007-8506(07)61708-9
Publication status	Published - 2002

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abstract = "Recent advancements and some emerging trends in the methods and instruments used for surface and near surface characterisation are presented, considering the measurement of both topography and physical properties. In particular, surfaces that present difficulties in measurement or require new procedures are considered, with emphasis on measurements approaching the nanometre scale. Examples of new instruments and promising innovations for roughness measurement and surface integrity characterisation are presented. The new needs for tolerancing, traceability and calibration are also addressed.",

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Emerging trends in surface metrology

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