This paper describes methods for accuracy enhancement in broadband modeling of on-wafer passive components using electromagnetic (EM) simulation. It is shown that standard excitation schemes for integrated component simulation leads to poor correlation with on-wafer measurements beyond the lower GHz frequency range. We show that this is due to parasitic effects and higher-order modes caused by the excitation schemes. We propose a simple equivalent circuit for the parasitic effects in the well-known ground ring excitation scheme. An extended L-2L calibration method is shown to improve significantly the accuracy of the on-wafer component modeling, when applied to parasitic effect removal associated with the excitation schemes.
|Title of host publication||Proceedings of the 37th European Microwave Conference : EuMIC 2007|
|Publication status||Published - 2007|
|Event||European Microwave Integrated Circuits - Munich, Germany|
Duration: 1 Jan 2007 → …
|Conference||European Microwave Integrated Circuits|
|Period||01/01/2007 → …|