Elevated temperature transmission Kikuchi diffraction in the SEM

Alice Bastos Fanta*, Matteo Todeschini, Andrew Burrows, Henri Jansen, Christian Danvad Damsgaard, Hossein Alimadadi, Jakob Birkedal Wagner

*Corresponding author for this work

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    Abstract

    Transmission Kikuchi diffraction (TKD) facilitates automated orientation mapping of thin films in scanning electron microscopes (SEM). In this study TKD is applied for the first time to perform in-situ annealing experiments on gold thin films deposited on a MEMS-based heating system. The very local heating associated with this system enables reliable TKD measurements at elevated temperatures without notable disturbance from infrared radiation. The dewetting of an Au thin film into Au nanoparticles upon heating is followed with orientation mapping in a temperature range between 20 °C and 900 °C. The local thickness variation associated with the dewetting is observed qualitatively by observing the intensity of the transmitted beam, which decreases as the film thickness increases locally. The results of this study reveal that TKD is a well suited technique to study thin-film stability and solid state dewetting. Moreover, the outcome of this methodological study provides a baseline for further in-situ crystallographic studies of electron transparent samples in the SEM.
    Original languageEnglish
    JournalMaterials Characterization
    Volume139
    Pages (from-to)452-462
    ISSN1044-5803
    DOIs
    Publication statusPublished - 2018

    Keywords

    • TKD
    • In-situ annealing
    • Solid state dewetting
    • Au thin-film

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