Electrostatic energy harvesting device with out-of-the-plane gap closing scheme

Fei Wang; Ole Hansen

doi:10.1109/Transducers.2013.6627249

Electrostatic energy harvesting device with out-of-the-plane gap closing scheme

Fei Wang, Ole Hansen

Surface Physics and Catalysis

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Abstract

In this paper, we report on an electrostatic energy harvester with an out-of-the-plane gap closing scheme. Using advanced MEMS technology, energy harvesting devices with a four wafer stack are batch fabricated and fully packaged at wafer scale. CYTOP polymer is used both as an electret material and an adhesive layer for low temperature wafer bonding. The overall size of the device is about 1.1×1.3 cm². With an external load of 13.4 MΩ, a power output of 0.15 μW is achieved when vibration at an acceleration amplitude of 1 g (9.8 m/s2) is applied at a low frequency of 96 Hz. The frequency response of the device is also measured and a broader bandwidth is observed at higher acceleration amplitude. © 2013 IEEE.

Original language	English
Title of host publication	Proceedings of the The 17th International Conference on Solid-State Sensors, Actuators and Microsystems : The 17th International Conference on Solid-State Sensors, Actuators and Microsystems
Publisher	IEEE
Publication date	2013
Pages	2237-2240
ISBN (Print)	9781467359832
DOIs	https://doi.org/10.1109/Transducers.2013.6627249 https://doi.org/10.1109/transducers.2013.6627249
Publication status	Published - 2013
Event	17th International Conference on Solid-State Sensors, Actuators and Microsystems - Centro de Convenciones Internacional de Barcelona (CCIB) , Barcelona, Spain Duration: 16 Jun 2013 → 20 Jun 2013 Conference number: 17 http://transducers-eurosensors2013.org/

Conference

Conference	17th International Conference on Solid-State Sensors, Actuators and Microsystems
Number	17
Location	Centro de Convenciones Internacional de Barcelona (CCIB)
Country/Territory	Spain
City	Barcelona
Period	16/06/2013 → 20/06/2013
Internet address	http://transducers-eurosensors2013.org/

Keywords

Energy harvesting
Electrets
MEMS
CYTOP

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Wang, F., & Hansen, O. (2013). Electrostatic energy harvesting device with out-of-the-plane gap closing scheme. In Proceedings of the The 17th International Conference on Solid-State Sensors, Actuators and Microsystems: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 2237-2240). IEEE. https://doi.org/10.1109/Transducers.2013.6627249, https://doi.org/10.1109/transducers.2013.6627249

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abstract = "In this paper, we report on an electrostatic energy harvester with an out-of-the-plane gap closing scheme. Using advanced MEMS technology, energy harvesting devices with a four wafer stack are batch fabricated and fully packaged at wafer scale. CYTOP polymer is used both as an electret material and an adhesive layer for low temperature wafer bonding. The overall size of the device is about 1.1×1.3 cm2. With an external load of 13.4 MΩ, a power output of 0.15 μW is achieved when vibration at an acceleration amplitude of 1 g (9.8 m/s2) is applied at a low frequency of 96 Hz. The frequency response of the device is also measured and a broader bandwidth is observed at higher acceleration amplitude. {\textcopyright} 2013 IEEE.",

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Wang, F & Hansen, O 2013, Electrostatic energy harvesting device with out-of-the-plane gap closing scheme. in Proceedings of the The 17th International Conference on Solid-State Sensors, Actuators and Microsystems: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE, pp. 2237-2240, 17th International Conference on Solid-State Sensors, Actuators and Microsystems , Barcelona, Spain, 16/06/2013. https://doi.org/10.1109/Transducers.2013.6627249, https://doi.org/10.1109/transducers.2013.6627249

Electrostatic energy harvesting device with out-of-the-plane gap closing scheme. / Wang, Fei; Hansen, Ole.
Proceedings of the The 17th International Conference on Solid-State Sensors, Actuators and Microsystems: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE, 2013. p. 2237-2240.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

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Wang F, Hansen O. Electrostatic energy harvesting device with out-of-the-plane gap closing scheme. In Proceedings of the The 17th International Conference on Solid-State Sensors, Actuators and Microsystems: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE. 2013. p. 2237-2240 doi: 10.1109/Transducers.2013.6627249, 10.1109/transducers.2013.6627249

Electrostatic energy harvesting device with out-of-the-plane gap closing scheme

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