Electroplating and characterization of cobalt-nickel-iron and nickel-iron for magnetic microsystems applications

Frank Engel Rasmussen; Jan Tue Ravnkilde; Peter Torben Tang; Ole Hansen; Siebe Bouwstra

Electroplating and characterization of cobalt-nickel-iron and nickel-iron for magnetic microsystems applications

Frank Engel Rasmussen, Jan Tue Ravnkilde, Peter Torben Tang, Ole Hansen, Siebe Bouwstra

Surface Physics and Catalysis

Research output: Contribution to journal › Journal article › Research › peer-review

Abstract

The magnetic properties of pulse reverse (PR) electroplated CoNiFe and DC electroplated NiTe are presented. CoNiFe is a very promising material for magnetic microsystems due to the possibility of achieving a high saturation flux density (B-s) and a low coercivity (H-c). A new bath formulation has been developed, which by means of PR electroplating makes it possible to deposit high B-s CoNiFe with a low residual stress level. The magnetic properties have been determined using a new simple measurement setup that allows for wafer level characterization. The results have been validated by comparison to measurements performed with a vibrating sample magnetometer (VSM).

Original language	English
Journal	Sensors and Actuators A-physical
Volume	92
Issue number	1-3
Pages (from-to)	242-248
Number of pages	7
ISSN	0924-4247
Publication status	Published - 2001

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title = "Electroplating and characterization of cobalt-nickel-iron and nickel-iron for magnetic microsystems applications",

abstract = "The magnetic properties of pulse reverse (PR) electroplated CoNiFe and DC electroplated NiTe are presented. CoNiFe is a very promising material for magnetic microsystems due to the possibility of achieving a high saturation flux density (B-s) and a low coercivity (H-c). A new bath formulation has been developed, which by means of PR electroplating makes it possible to deposit high B-s CoNiFe with a low residual stress level. The magnetic properties have been determined using a new simple measurement setup that allows for wafer level characterization. The results have been validated by comparison to measurements performed with a vibrating sample magnetometer (VSM).",

author = "Rasmussen, {Frank Engel} and Ravnkilde, {Jan Tue} and Tang, {Peter Torben} and Ole Hansen and Siebe Bouwstra",

year = "2001",

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volume = "92",

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T1 - Electroplating and characterization of cobalt-nickel-iron and nickel-iron for magnetic microsystems applications

AU - Rasmussen, Frank Engel

AU - Ravnkilde, Jan Tue

AU - Tang, Peter Torben

AU - Hansen, Ole

AU - Bouwstra, Siebe

PY - 2001

Y1 - 2001

N2 - The magnetic properties of pulse reverse (PR) electroplated CoNiFe and DC electroplated NiTe are presented. CoNiFe is a very promising material for magnetic microsystems due to the possibility of achieving a high saturation flux density (B-s) and a low coercivity (H-c). A new bath formulation has been developed, which by means of PR electroplating makes it possible to deposit high B-s CoNiFe with a low residual stress level. The magnetic properties have been determined using a new simple measurement setup that allows for wafer level characterization. The results have been validated by comparison to measurements performed with a vibrating sample magnetometer (VSM).

AB - The magnetic properties of pulse reverse (PR) electroplated CoNiFe and DC electroplated NiTe are presented. CoNiFe is a very promising material for magnetic microsystems due to the possibility of achieving a high saturation flux density (B-s) and a low coercivity (H-c). A new bath formulation has been developed, which by means of PR electroplating makes it possible to deposit high B-s CoNiFe with a low residual stress level. The magnetic properties have been determined using a new simple measurement setup that allows for wafer level characterization. The results have been validated by comparison to measurements performed with a vibrating sample magnetometer (VSM).

M3 - Journal article

SN - 0924-4247

VL - 92

SP - 242

EP - 248

JO - Sensors and Actuators A-physical

JF - Sensors and Actuators A-physical

IS - 1-3

ER -

Electroplating and characterization of cobalt-nickel-iron and nickel-iron for magnetic microsystems applications

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