Electroplating and characterization of cobalt-nickel-iron and nickel-iron for magnetic microsystems applications

Frank Engel Rasmussen, Jan Tue Ravnkilde, Peter Torben Tang, Ole Hansen, Siebe Bouwstra

Research output: Contribution to journalJournal articleResearchpeer-review

Abstract

The magnetic properties of pulse reverse (PR) electroplated CoNiFe and DC electroplated NiTe are presented. CoNiFe is a very promising material for magnetic microsystems due to the possibility of achieving a high saturation flux density (B-s) and a low coercivity (H-c). A new bath formulation has been developed, which by means of PR electroplating makes it possible to deposit high B-s CoNiFe with a low residual stress level. The magnetic properties have been determined using a new simple measurement setup that allows for wafer level characterization. The results have been validated by comparison to measurements performed with a vibrating sample magnetometer (VSM).
Original languageEnglish
JournalSensors and Actuators A-physical
Volume92
Issue number1-3
Pages (from-to)242-248
Number of pages7
ISSN0924-4247
Publication statusPublished - 2001

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