Electroplated Ni Comb accelerometers for CMOS post processing.

Leif Steen Johansen, Jan Tue Ravnkilde, A.D. Yalcinkaya, Ole Hansen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationElectroplated Ni Comb accelerometers for CMOS post processing.
    Publication date1999
    Pages409-410
    Publication statusPublished - 1999
    Event13th European Conference on Solid-State Transducers - The Hague, Netherlands
    Duration: 12 Sep 199915 Sep 1999
    Conference number: 13

    Conference

    Conference13th European Conference on Solid-State Transducers
    Number13
    CountryNetherlands
    CityThe Hague
    Period12/09/199915/09/1999

    Cite this

    Johansen, L. S., Ravnkilde, J. T., Yalcinkaya, A. D., & Hansen, O. (1999). Electroplated Ni Comb accelerometers for CMOS post processing. In Electroplated Ni Comb accelerometers for CMOS post processing. (pp. 409-410)