Electroplated compliant metal micro actuators with small
                feature sizes using a removable SU-8 mould.

Ras Kaas Vestergaard; Siebe Bouwstra

Electroplated compliant metal micro actuators with small feature sizes using a removable SU-8 mould.

Ras Kaas Vestergaard, Siebe Bouwstra

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Electroplated compliant metal micro actuators with small feature sizes using a removable SU-8 mould.
Publisher	The Institute of Electrical Engineers of Japan
Publication date	1999
Pages	96-97
Publication status	Published - 1999
Event	10th International Conference on Solid-State Sensors and Actuators (Transducers ’99) - Sendai, Japan Duration: 1 Jan 1999 → … Conference number: 10

Conference

Conference	10th International Conference on Solid-State Sensors and Actuators (Transducers ’99)
Number	10
Country/Territory	Japan
City	Sendai
Period	01/01/1999 → …

OpenUrl availability

Full text

Cite this

@inproceedings{565c2c14d8c84d7aaff845ba482582f2,

title = "Electroplated compliant metal micro actuators with small feature sizes using a removable SU-8 mould.",

author = "Vestergaard, {Ras Kaas} and Siebe Bouwstra",

year = "1999",

language = "English",

pages = "96--97",

booktitle = "Electroplated compliant metal micro actuators with small feature sizes using a removable SU-8 mould.",

publisher = "The Institute of Electrical Engineers of Japan",

note = "10th International Conference on Solid-State Sensors and Actuators (Transducers {\textquoteright}99), Transducers {\textquoteright}99 ; Conference date: 01-01-1999",

}

Vestergaard, RK & Bouwstra, S 1999, Electroplated compliant metal micro actuators with small feature sizes using a removable SU-8 mould. in Electroplated compliant metal micro actuators with small feature sizes using a removable SU-8 mould.. The Institute of Electrical Engineers of Japan, pp. 96-97, 10th International Conference on Solid-State Sensors and Actuators (Transducers ’99), Sendai, Japan, 01/01/1999.

Electroplated compliant metal micro actuators with small feature sizes using a removable SU-8 mould. / Vestergaard, Ras Kaas; Bouwstra, Siebe.
Electroplated compliant metal micro actuators with small feature sizes using a removable SU-8 mould.. The Institute of Electrical Engineers of Japan, 1999. p. 96-97.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - Electroplated compliant metal micro actuators with small feature sizes using a removable SU-8 mould.

AU - Vestergaard, Ras Kaas

AU - Bouwstra, Siebe

N1 - Conference code: 10

PY - 1999

Y1 - 1999

M3 - Article in proceedings

SP - 96

EP - 97

BT - Electroplated compliant metal micro actuators with small feature sizes using a removable SU-8 mould.

PB - The Institute of Electrical Engineers of Japan

T2 - 10th International Conference on Solid-State Sensors and Actuators (Transducers ’99)

Y2 - 1 January 1999

ER -