Electroplated compliant metal micro actuators with small feature sizes using a removable SU-8 mould.

Ras Kaas Vestergaard, Siebe Bouwstra

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationElectroplated compliant metal micro actuators with small feature sizes using a removable SU-8 mould.
    PublisherThe Institute of Electrical Engineers of Japan
    Publication date1999
    Pages96-97
    Publication statusPublished - 1999
    Event10th International Conference on Solid-State Sensors and Actuators (Transducers ’99) - Sendai, Japan
    Duration: 1 Jan 1999 → …
    Conference number: 10

    Conference

    Conference10th International Conference on Solid-State Sensors and Actuators (Transducers ’99)
    Number10
    CountryJapan
    CitySendai
    Period01/01/1999 → …

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