Electronic scheme for multiplexed dynamic behavior excitation and detection of piezoelectric silicon-based micromembranes

C. Ayela, T. Alava, D. Lagrange, D. Rèmiens, C. Soyer, T. Ondarcuhu, Anders Greve, L. Nicu

Research output: Contribution to journal › Journal article › Research › peer-review

Access to Document

@article{c7887dde9fee4ababb3a2fe4cfdfc65a,

title = "Electronic scheme for multiplexed dynamic behavior excitation and detection of piezoelectric silicon-based micromembranes",

author = "C. Ayela and T. Alava and D. Lagrange and D. R{\`e}miens and C. Soyer and T. Ondarcuhu and Anders Greve and L. Nicu",

year = "2008",

doi = "10.1109/JSEN.2007.913021",

language = "English",

volume = "8",

pages = "210--217",

journal = "IEEE Sensors Journal",

issn = "1530-437X",

publisher = "Institute of Electrical and Electronics Engineers",

number = "3-4",

}

TY - JOUR

T1 - Electronic scheme for multiplexed dynamic behavior excitation and detection of piezoelectric silicon-based micromembranes

AU - Ayela, C.

AU - Alava, T.

AU - Lagrange, D.

AU - Rèmiens, D.

AU - Soyer, C.

AU - Ondarcuhu, T.

AU - Greve, Anders

AU - Nicu, L.

PY - 2008

Y1 - 2008

U2 - 10.1109/JSEN.2007.913021

DO - 10.1109/JSEN.2007.913021

M3 - Journal article

SN - 1530-437X

VL - 8

SP - 210

EP - 217

JO - IEEE Sensors Journal

JF - IEEE Sensors Journal

IS - 3-4

ER -