Electron-beam patterning organic ice resists

Anna Elsukova, William Tiddi, Anpan Han, Marco Beleggia

    Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

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    Original languageEnglish
    Publication date2018
    Publication statusPublished - 2018
    EventThe 62nd International Conference on Electron, Ion, and Proton Beam Technology and Nanofabrication - Rio Mar Beach Resort and Spa, Puerto Rico, United States
    Duration: 29 May 2018 → 1 Jun 2018
    http://www.eipbn.org/2018/

    Conference

    ConferenceThe 62nd International Conference on Electron, Ion, and Proton Beam Technology and Nanofabrication
    LocationRio Mar Beach Resort and Spa
    Country/TerritoryUnited States
    CityPuerto Rico
    Period29/05/2018 → 01/06/2018
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