Electron-beam patterning organic ice resists

Anna Elsukova, William Tiddi, Anpan Han, Marco Beleggia

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

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Original languageEnglish
Publication date2018
Publication statusPublished - 2018
EventThe 62nd International Conference on Electron, Ion, and Proton Beam Technology and Nanofabrication - Rio Mar Beach Resort and Spa, Puerto Rico, United States
Duration: 29 May 20181 Jun 2018
http://www.eipbn.org/2018/

Conference

ConferenceThe 62nd International Conference on Electron, Ion, and Proton Beam Technology and Nanofabrication
LocationRio Mar Beach Resort and Spa
CountryUnited States
CityPuerto Rico
Period29/05/201801/06/2018
Internet address

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