| Original language | English |
|---|---|
| Publication date | 2018 |
| Publication status | Published - 2018 |
| Event | The 62nd International Conference on Electron, Ion, and Proton Beam Technology and Nanofabrication - Rio Mar Beach Resort and Spa, Puerto Rico, United States Duration: 29 May 2018 → 1 Jun 2018 http://www.eipbn.org/2018/ |
Conference
| Conference | The 62nd International Conference on Electron, Ion, and Proton Beam Technology and Nanofabrication |
|---|---|
| Location | Rio Mar Beach Resort and Spa |
| Country | United States |
| City | Puerto Rico |
| Period | 29/05/2018 → 01/06/2018 |
| Internet address |
Cite this
Elsukova, A., Tiddi, W., Han, A., & Beleggia, M. (2018). Electron-beam patterning organic ice resists. Abstract from The 62nd International Conference on Electron, Ion, and Proton Beam Technology and Nanofabrication, Puerto Rico, United States.
@conference{69c2df2cb6964af9ac34365ae020ba59,
title = "Electron-beam patterning organic ice resists",
author = "Anna Elsukova and William Tiddi and Anpan Han and Marco Beleggia",
year = "2018",
language = "English",
note = "The 62nd International Conference on Electron, Ion, and Proton Beam Technology and Nanofabrication, EIPBN 2018 ; Conference date: 29-05-2018 Through 01-06-2018",
url = "http://www.eipbn.org/2018/",
}
Elsukova, A, Tiddi, W, Han, A & Beleggia, M 2018, 'Electron-beam patterning organic ice resists', The 62nd International Conference on Electron, Ion, and Proton Beam Technology and Nanofabrication, Puerto Rico, United States, 29/05/2018 - 01/06/2018.
Electron-beam patterning organic ice resists. / Elsukova, Anna; Tiddi, William; Han, Anpan; Beleggia, Marco.
2018. Abstract from The 62nd International Conference on Electron, Ion, and Proton Beam Technology and Nanofabrication, Puerto Rico, United States.Research output: Contribution to conference › Conference abstract for conference › Research › peer-review
TY - ABST
T1 - Electron-beam patterning organic ice resists
AU - Elsukova, Anna
AU - Tiddi, William
AU - Han, Anpan
AU - Beleggia, Marco
PY - 2018
Y1 - 2018
M3 - Conference abstract for conference
ER -
Elsukova A, Tiddi W, Han A, Beleggia M. Electron-beam patterning organic ice resists. 2018. Abstract from The 62nd International Conference on Electron, Ion, and Proton Beam Technology and Nanofabrication, Puerto Rico, United States.