Electron-beam patterning organic ice resists

Anna Elsukova, William Tiddi, Anpan Han, Marco Beleggia

    Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

    183 Downloads (Pure)
    Original languageEnglish
    Publication date2018
    Publication statusPublished - 2018
    EventThe 62nd International Conference on Electron, Ion, and Proton Beam Technology and Nanofabrication - Rio Mar Beach Resort & Spa, Rio Grande, Puerto Rico
    Duration: 29 May 20181 Jun 2018
    Conference number: 62
    http://www.eipbn.org/2018/

    Conference

    ConferenceThe 62nd International Conference on Electron, Ion, and Proton Beam Technology and Nanofabrication
    Number62
    LocationRio Mar Beach Resort & Spa
    Country/TerritoryPuerto Rico
    CityRio Grande
    Period29/05/201801/06/2018
    Internet address

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