Electron-beam patterning organic ice resists

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

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Original languageEnglish
Publication date2018
Publication statusPublished - 2018
EventThe 62nd International Conference on Electron, Ion, and Proton Beam Technology and Nanofabrication - Rio Mar Beach Resort and Spa, Puerto Rico, United States
Duration: 29 May 20181 Jun 2018
http://www.eipbn.org/2018/

Conference

ConferenceThe 62nd International Conference on Electron, Ion, and Proton Beam Technology and Nanofabrication
LocationRio Mar Beach Resort and Spa
CountryUnited States
CityPuerto Rico
Period29/05/201801/06/2018
Internet address

Cite this

Elsukova, A., Tiddi, W., Han, A., & Beleggia, M. (2018). Electron-beam patterning organic ice resists. Abstract from The 62nd International Conference on Electron, Ion, and Proton Beam Technology and Nanofabrication, Puerto Rico, United States.
Elsukova, Anna ; Tiddi, William ; Han, Anpan ; Beleggia, Marco. / Electron-beam patterning organic ice resists. Abstract from The 62nd International Conference on Electron, Ion, and Proton Beam Technology and Nanofabrication, Puerto Rico, United States.
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title = "Electron-beam patterning organic ice resists",
author = "Anna Elsukova and William Tiddi and Anpan Han and Marco Beleggia",
year = "2018",
language = "English",
note = "The 62nd International Conference on Electron, Ion, and Proton Beam Technology and Nanofabrication, EIPBN 2018 ; Conference date: 29-05-2018 Through 01-06-2018",
url = "http://www.eipbn.org/2018/",

}

Elsukova, A, Tiddi, W, Han, A & Beleggia, M 2018, 'Electron-beam patterning organic ice resists', The 62nd International Conference on Electron, Ion, and Proton Beam Technology and Nanofabrication, Puerto Rico, United States, 29/05/2018 - 01/06/2018.

Electron-beam patterning organic ice resists. / Elsukova, Anna; Tiddi, William; Han, Anpan; Beleggia, Marco.

2018. Abstract from The 62nd International Conference on Electron, Ion, and Proton Beam Technology and Nanofabrication, Puerto Rico, United States.

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

TY - ABST

T1 - Electron-beam patterning organic ice resists

AU - Elsukova, Anna

AU - Tiddi, William

AU - Han, Anpan

AU - Beleggia, Marco

PY - 2018

Y1 - 2018

M3 - Conference abstract for conference

ER -

Elsukova A, Tiddi W, Han A, Beleggia M. Electron-beam patterning organic ice resists. 2018. Abstract from The 62nd International Conference on Electron, Ion, and Proton Beam Technology and Nanofabrication, Puerto Rico, United States.