Electron beam lithography based fabrication of nanocantielver mass sensor systems on pre-processed CMOS

Esko Sebastian Forsén; Sara G. Nilsson; Gabriel Abadal; Francesc P. Murano; Jaume Esteve; Josep Montserrat; Eduard Figueras; Francesca Campabadal; Jaume V. Martorell; Lars Montelius; Nuria Barniol; Anja Boisen

Electron beam lithography based fabrication of nanocantielver mass sensor systems on pre-processed CMOS

Esko Sebastian Forsén, Sara G. Nilsson, Gabriel Abadal, Francesc P. Murano, Jaume Esteve, Josep Montserrat, Eduard Figueras, Francesca Campabadal, Jaume V. Martorell, Lars Montelius, Nuria Barniol, Anja Boisen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of MNE 2004
Publication date	2004
Pages	108-109
Publication status	Published - 2004

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@inproceedings{d1385d59d4fb4a8d8cf5589f826274b7,

title = "Electron beam lithography based fabrication of nanocantielver mass sensor systems on pre-processed CMOS",

author = "Fors{\'e}n, \{Esko Sebastian\} and Nilsson, \{Sara G.\} and Gabriel Abadal and Murano, \{Francesc P.\} and Jaume Esteve and Josep Montserrat and Eduard Figueras and Francesca Campabadal and Martorell, \{Jaume V.\} and Lars Montelius and Nuria Barniol and Anja Boisen",

year = "2004",

language = "English",

pages = "108--109",

booktitle = "Proceedings of MNE 2004",

}

TY - GEN

T1 - Electron beam lithography based fabrication of nanocantielver mass sensor systems on pre-processed CMOS

AU - Forsén, Esko Sebastian

AU - Nilsson, Sara G.

AU - Abadal, Gabriel

AU - Murano, Francesc P.

AU - Esteve, Jaume

AU - Montserrat, Josep

AU - Figueras, Eduard

AU - Campabadal, Francesca

AU - Martorell, Jaume V.

AU - Montelius, Lars

AU - Barniol, Nuria

AU - Boisen, Anja

PY - 2004

Y1 - 2004

M3 - Article in proceedings

SP - 108

EP - 109

BT - Proceedings of MNE 2004

ER -