Original language | English |
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Journal | Sensors and Actuators, A-physical |
Volume | 83 |
Issue number | 1-3 |
Pages (from-to) | 156-160 |
Publication status | Published - 2000 |
Electroforming of 3D microstructures on highly structured surfaces
Leif Steen Johansen, Morten Ginnerup, Jan Tue Ravnkilde, Peter Torben Tang, B. Löchel
Research output: Contribution to journal › Journal article › Research › peer-review