Electroforming of 3D microstructures on highly structured surfaces

Leif Steen Johansen, Morten Ginnerup, Jan Tue Ravnkilde, Peter Torben Tang, B. Löchel

    Research output: Contribution to journalJournal articlepeer-review

    Original languageEnglish
    JournalSensors and Actuators, A-physical
    Volume83
    Issue number1-3
    Pages (from-to)156-160
    Publication statusPublished - 2000

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