Original language | English |
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Journal | J. Microelectromech. Syst. |
Volume | 8 |
Pages (from-to) | 373-383 |
Publication status | Published - 1999 |
Electrochemically driven polypyrrole bilayers for moving and positioning bulk micromachined silicon plates
E. Smela, M. Kallenbach, J. Holdenried
Research output: Contribution to journal › Journal article › Research